MEMS a Radiofrequenza Perugia, 5/12/2003. Scientific Satellites The exploration of the Universe is emotion based on calculation

Transcript

1 Scientific Satellites The exploration of the Universe is emotion based on calculation Telecommunications For every new way of communicating there is a new world of communications LABEN S.p.A. Space Software Italia S.p.A. Quadrics Supercomputers World Ltd. Remote Sensing Studying phenomena when they occur, wherever they occur Infrastructures Creating workplaces with no lack of space

2 Sviluppo di RF MEMS in Alenia Spazio Sergio Di Nardo Alenia Spazio, L Aquila

3 Introduzione MEMS a Radiofrequenza Perugia, 5/12/2003 Alenia Spazio non ha al suo interno la capacità di realizzare dispositivi integrati su silicio (tipo C-MOS) [tecnologia disponibile presso IRST- Trento] Alenia Spazio ha al suo interno laboratori capaci di realizzare circuiti ibridi (di controllo, RF, digitali, ) di livello spaziale Una delle tecnologie consolidate di Alenia Spazio è quella del film sottile/allumina (particolarmente indicata per strutture RF) Negli ultimi anni è stata messa a punto una linea produttiva per multistrati e packages in LTCC La capacità di realizzare strutture in film sottile è stata implementata anche su substrati in LTCC

4 COFIRING PROCESS cut punch fill print assemble laminate cofire burn out metallize cut assembly

5 Some pictures MEMS a Radiofrequenza Perugia, 5/12/2003

6 Digital Demodulator: comparison between old and new version Hybrid version (NEW) (with naked rad-hard RAMs and naked ASIC) Hybrid Solution reduce space and weight of about 75% respect to PCB board. The pictures are on the same scale ASIC RAMs PCB version (OLD) (with packaged RAMs and ASIC)

7 MEMS a Radiofrequenza Perugia, 5/12/2003 Thin film 20Ghz filter on LTCC Thin film resonators on LTCC RF OUT 1 RF OUT 2 RF structures on LTCC Thin film 20Ghz Lange coupler on LTCC RF switch matrix test structure with microstrips and striplines on LTCC RF IN

8 Wide band loaded stripline 3dB single step coupler Adapted line with buried loa Narrow band filter stripline with 90 bend Wide band filter DC block (1.5mm coupling distance) RF structrures buried on LTCC Working frequency around 10Ghz 3dB branch line on LTCC

9 Kovar ring Digital Demodulator package integration Kovar leads LTCC PACKAGE LTCC substrate

10 Kovar frame LTCC RF transitions Notches for LTCC transitions LTCC PACKAGE LTCC substrate Down Converter package integration

11 Ku/IF/BB Down Converter Multiband Down Converter/Receiver Two kinds of Down Converter hybrid modules for Multi Carrier Demodulator have been developed. Both the kinds integrates into a single package all the frequency convertion chain together with its control section. The main difference is that the package reported in the picture on the left is capable to host only a convertion circuit from Ku band down to 50MHz. The package in the right side is more versatile. In fact it is capable to host circuits that down converts signals starting from Ku-band to S-band. Both these prototypes have been assembled and are under test.

12 Ball Grid Arrays MEMS a Radiofrequenza Perugia, 5/12/2003 CBGA625 component with daisy chain (detail on the right picture). Solder paste printed by means of a stencil on PCB. Solder paste printed by means of a dispenser on CBGA. PCB with CBGA625 dog bon pads (detail on the right picture) for trials soldering of CBGA component Solder joints formed between CGBA625 solder balls and printed solder paste on PCB after reflow.

13 Processi tecnologici disponibili per MEMS Metallizzazione film sottile per sputtering (NiCr+O2, Pd, Au, Cr, Cu) Accrescimento galvanico (Au) Fotolitografia (fotoresist, polimmide) Dry etching (ion beam, RIE) Deposizione di materiali dielettrici per sputtering (quarzo, allumina) Fornace in quarzo per SiO2 (Si thermal oxide)

14 Sviluppi tecnologici futuri MEMS a Radiofrequenza Perugia, 5/12/2003 Strutture MEMS su Si (foundry IRST-Trento) Realizzazione di strutture MEMS RF su allumina; permette l integrazione su di un unico substrato di: strutture MEMS RF funzioni RF ad alte prestazioni Realizzazione di strutture MEMS RF su LTCC; in questo modo si potrebbero integrare in un unico package ermetico tutte le funzioni: strutture MEMS RF funzioni RF circuiteria di controllo

15 Possibili applicazioni MEMS a Radiofrequenza Perugia, 5/12/2003 Phase Shifter Linee di ritardo/tdl per antenne attive (satelliti COSMO) Switch Matrix, Butler Matrix Nuove applicazioni sfruttando le capacità 3D della tecnologia LTCC (strutture RF integrate, connessioni 3D, linee si trasmissione, combinatori/divisori, ibride, passivi integrati, )