Thin diamond film development. M. Nicola Mazziotta INFN-Bari

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1 Thin diamond film development M. Nicola Mazziotta INFN-Bari

2 PS 136 Regione Puglia Sviluppo di un rivelatore a film di diamante per radiazione ultravioletta Deposizione dei film di diamante poli-/nano-cristallino con la tecnica microwave plasma enhanced chemical vapour deposition (MWPECVD) Sintesi di film PCD (polycrystalline diamond) basata sulla plasma laser deposition (PLD) Caratterizzazione dei film (interferometria pirometrica in situ, SEM, XRD, RAMAN) Assemblaggio, caratterizzazione elettrica, elettronica e acquisizione sensori Coordinatore: Paolo Spinelli UR1: Dipartimento Interuniversitario di Fisica-Università di Bari Aldo Moro (Paolo Spinelli) UR2: Dipartimento Interuniversitario di Fisica-Politecnico di Bari (Nicola Giglietto) UR3: CNR-Istituto di Metodologie Inorganiche e dei Plasmi Bari (Grazia Cicala) UR4: Dipartimento di Chimica- Università di Bari Aldo Moro (Savino Longo) ALTA SpA (Pisa) Planetek srl (Bari) Aurelia Microelettronica (Viareggio) Durata: 49 mesi dal 12/2006 Costo totale: Cofinanziamento Regione Puglia: PS M. Nicola Mazziotta 2

3 Reattore a plasma Miscela gassosa con una bassa concentrazione ( 5%) di CH 4 in H 2. PS M. Nicola Mazziotta 3

4 Intensity (x10 3 a.u.) Intensity (x10 3 a.u.) Sample Substrate (500µm thick) Sample-ID Total film thickness (µm) CH 4 /H 2 (%) Power (W) Press. (mbar) Avg. surface temp. ( C) Growth rate (µm/h) R (%)* Grain size** (µm) Roughness *** (µm) p-si Diam66_ i-si Diam66_ , i-si S(6) , p-si S(8) , Diam66_1 on p-si Diam66_3 on i-si * Raman quality factor: R = I sp3 / (I photoluminescence + I sp3 + I no_diamond )*100 ** Scanning Electron Microscopy, SEM *** Optical Microscope Raman shift (cm -1 ) S6 on i-si S8 on p-si Raman shift (cm -1 ) PS M. Nicola Mazziotta 4

5 dark current (na) Assemblaggio sensore e caratterizzazione Photolithographic mask 1 cm Cr/Au contacts 20/200nm 500X DARK BOX 2 1,5 1 0, Diam66_1 20 m Gap Diam66_3 20 m Gap E (kv/cm) S(6) 30 m Gap S(8) 30 m Gap Thermal annealing at 700 C (1h) in CH 4 atmosphere, followed by 400 C (1h) in air is very effective in reducing dark currents. PS M. Nicola Mazziotta 5

6 Count oscilloscope Optical Characterization Setup sensor Vbias optical filters Xe flash lamp S(6) Gap 30 18KV/cm Vrms=1.56mV ENC= PS M. Nicola Mazziotta noise (mv) 6

7 Vout (mv) Collected electrons/ Number of incident photons Vout (mv) Results 1 x x x x 10-4 (nm) S(6) GAP 30 18kV/cm Efield Straight linear trend 1000 nm noise = mv 1 ENC=3560e 1E+5 1E+7 1E+9 Number of incident photons 1 x 10-5 S(6) S(8) Diam66_3 Diam66_ Diam66_1 and Diam66_3: C=W= 20 μm S6 and S8: : C=W= 20 μm UV/VIS about Vout vs Vbias 30 m Gap 2E+8 incident photons on nm 50 m Gap Vbias (V) PS M. Nicola Mazziotta 7

8 Diamond films photo-emissivity PS M. Nicola Mazziotta 8

9 PHODAC PHOtocathodes based on Diamond Amorphous and Crystalline (PHODAC) Realizzazione di fotocatodi a film di diamante per la rivelazione di radiazione Cherenkov nell UV Collabarozioni: Istituto di Metodologie Inorganiche e dei Plasmi IMIP-CNR Sezione di Bari Laboratoire d Ingénierie des Materiaux et des Hautes Pressions (LIMHP) del CNRS-UPR Université Paris PS M. Nicola Mazziotta 9

10 Risultati misure di QE A.S. Tremsin and O.H.W. Siegmund Proceedings SPIE, vol. 4139, San Diego, California (2000) OUS-14 PS M. Nicola Mazziotta 10

11 Reference Thermoluminescent Response of Thin (< 2 μm) Polycrystalline Diamond Films Grown by Pulsed and Continuous Microwave Plasmas, Diamond and Related Materials (2010) Study of polycrystalline diamond deposition by continuous and pulsed discharges, Surface & Coatings Technology (2010) Characterization of poly-crystalline diamond films grown by Microwave Plasma Enhanced Chemical Vapor Deposition (MWPECVD) for UV radiation detection, Nuclear Instruments and Methods in Physics Research A, (2010) Mechanical Properties of MWPECVD Diamond Coatings on Si Substrate via Nanoindentation, Diamond and Related Materials 20 (2011) 221 A comparative study on comb electrodes devices made of MWPECVD diamond films grown on p-doped and intrinsic silicon substrate, Diamond and Related Materials 20 (2011) 1005 Effect of Properties of MWPECVD Polycrystalline Diamond Films on Photoemissive Response, Diamond and Related Materials 20 (2011) 1199 PS M. Nicola Mazziotta 11